Home
World's Largest FPGA/CPLD Portal

ASML’s NXE:3100 EUV lithography tools

Imec produces high-quality EUV sensors for ASML’s next-generation lithography tools

Leuven, Belgium – October 11, 2011 – Imec announces that it has successfully qualified a chipset consisting of custom high-quality EUV sensor dies. These are now being integrated in ASML’s NXE:3100 EUV lithography tools in the field, improving the tools’ overlay and critical dimension (CD) tool performance.

Facebook  Twitter  Linkedin  Orkut  YouTube      RSS

 

Check out FPGA related videos

Find Us On Facebook